CMOS Cantilever Sensor Systems: Atomic Force Microscopy And Gas Sensing Applications
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| Google books | books.google.com |
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| Originally published | July 23, 2002 |
| Authors | Henry Baltes |
| Oliver Brand | |
| D. Lange | |
| Editors | Henry Baltes |
| Oliver Brand | |
| Date of Reg. | |
| Date of Upd. | |
| ID | 2223545 |
About CMOS Cantilever Sensor Systems: Atomic Force Microscopy And Gas Sensing Applications
This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. . . .