CMOS - MEMS
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| Google books | books.google.com |
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| Originally published | March 11, 2005 |
| Editors | Oliver Brand |
| Osamu Tabata | |
| Henry Baltes | |
| Gary K. Fedder | |
| Jan G. Korvink | |
| Date of Reg. | |
| Date of Upd. | |
| ID | 2034936 |
About CMOS - MEMS
Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. . . .