Resonant MEMS: Fundamentals, Implementation, And Application
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| Originally published | April 22, 2015 |
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| ID | 2222087 |
About Resonant MEMS: Fundamentals, Implementation, And Application
Resonant microelectromechanical systems (MEMS) are characterized by sub-millimeter-sized components that are able to oscillate. Depending on the actuation method, these resonant MEMS are implemented, e. g. , as electrostatic, electrothermal, magnetostatic or piezoelectric devices. . . .