Microsensors
| Use attributes for filter ! | |
| Google books | books.google.com |
|---|---|
| Originally published | September 6, 1994 |
| Authors | J. W. Gardner |
| Published | September 6, 1994 |
| Media actions | www.worldcat.org |
| Get book actions | www.worldcat.org |
| Date of Reg. | |
| Date of Upd. | |
| ID | 2913623 |
About Microsensors
The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. ...