Dichlorosilane
| Use attributes for filter ! | |
| Formula | H2Cl2Si |
|---|---|
| Boiling point | 8. 3 °C |
| Vapor pressure | 167. 2 kPa (at 20 °C) |
| Density | 1. 22 g cm−3 |
| Autoignition temperature | 55 °C (131 °F; 328 K) |
| Flash point | −37 °C (−35 °F; 236 K) |
| Date of Reg. | |
| Date of Upd. | |
| ID | 2448760 |
About Dichlorosilane
Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H₂SiCl₂. In its major use, it is mixed with ammonia in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS:NH₃, usually results in lower stress nitride films.
Dichlorosilane Photos
