Trichlorosilane photograph

Trichlorosilane

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Molar mass135. 45 g/mol
Density1. 34 g/cm³
FormulaHCl3Si
Boiling point31. 8 °C
Flash point−27 °C (−17 °F; 246 K)
Autoignition temperature185 °C (365 °F; 458 K)
Date of Reg.
Date of Upd.
ID1197641
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About Trichlorosilane


Trichlorosilane is an inorganic compound with the formula HSiCl₃. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a silicone polymer while giving off hydrochloric acid.

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