Trichlorosilane
| Use attributes for filter ! | |
| Molar mass | 135. 45 g/mol |
|---|---|
| Density | 1. 34 g/cm³ |
| Formula | HCl3Si |
| Boiling point | 31. 8 °C |
| Flash point | −27 °C (−17 °F; 246 K) |
| Autoignition temperature | 185 °C (365 °F; 458 K) |
| Date of Reg. | |
| Date of Upd. | |
| ID | 1197641 |
About Trichlorosilane
Trichlorosilane is an inorganic compound with the formula HSiCl₃. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a silicone polymer while giving off hydrochloric acid.