Spectroscopic Ellipsometry
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| Google books | books.google.com |
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| Originally published | June 20, 2003 |
| Authors | Hiroyuki Fujiwara |
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| ID | 2130655 |
About Spectroscopic Ellipsometry
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). . . .