Handbook Of Ion Beam Processing . . .
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| Google books | books.google.com |
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| Originally published | 1989 |
| Editors | Stephen M. Rossnagel |
| J. J. Cuomo | |
| Harold R. Kaufman | |
| Date of Reg. | |
| Date of Upd. | |
| ID | 2244774 |
About Handbook Of Ion Beam Processing . . .
This book, by 36 authorities on the subject, deals with ion beam processing for basic sputter etching of samples, for sputter deposition of thin films, for synthesis of material in thin film form, and of the modification of thin film properties.