Fundamental Electron Interactions With Plasma Processing Gases
| Use attributes for filter ! | |
| Google books | books.google.com |
|---|---|
| Originally published | 2004 |
| Authors | James K. Olthoff |
| Loucas G. Christophorou | |
| Music groups | Gaseous Dielectrics X |
| Date of Reg. | |
| Date of Upd. | |
| ID | 2130713 |
About Fundamental Electron Interactions With Plasma Processing Gases
This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. . . .