Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications photograph

Atomic Layer Deposition: Principles, Characteristics, And Nanotechnology Applications

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Originally published 2013
AuthorsTommi Kaariainen
Marja-Leena K??ri?inen
Arthur Sherman
David Cameron
Date of Reg.
Date of Upd.
ID2457060
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About Atomic Layer Deposition: Principles, Characteristics, And Nanotechnology Applications


Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. . . .

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